Limits to the integration of filters and lenses on thermoelectric IR detectors by flip-chip techniques

被引:21
作者
Fonollosa, J. [1 ,3 ]
Carmona, M. [3 ]
Santander, J. [2 ]
Fonseca, L. [2 ]
Moreno, M. [1 ]
Marco, S. [1 ,3 ]
机构
[1] Univ Barcelona, Dept Elect, E-08028 Barcelona, Spain
[2] Ctr Nacl Microelect, Bellaterra 08193, Spain
[3] Inst Bioengn Catalonia, Artificial Olfact Lab, Barcelona 08028, Spain
关键词
Assembly; Infrared sensor; Infrared filter; Fresnel lenses; FEM simulation; Optimization; SILICON; SENSOR; MICROSPECTROMETER; RANGE;
D O I
10.1016/j.sna.2008.10.008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In the trend towards miniaturization, a detector module containing multiple IR sensor channels is being built and characterized. In its final form it contains thermopiles, narrow band filters and Fresnel lenses. An important feature of such module is the assembly by flip-chip of the IR filters on top of the thermopiles. The performance of the filter-thermopile ensemble has been assessed by physical simulation and experiments and it has been optimized by the use of an empirically validated model. It has been found that integration of filters (or lenses) too close to the IR detector may lead to degraded performance due to thermal coupling. The impact and extent of this degradation has been thoroughly explored, being the main parameter the distance between the IR sensor and the filter. To avoid such detrimental effects a possibility is to set the device in vacuum conditions, obtaining an improved output response and avoiding the influence of the filters. Another way is to increase the solder joint height. Beyond a certain height, the filter is considered to be isolated from the thermopile. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:65 / 73
页数:9
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