Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask

被引:22
作者
Jiang, HJ [1 ]
Yuan, XC [1 ]
Yun, ZS [1 ]
Chan, YC [1 ]
Lam, YL [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS | 2001年 / 16卷 / 1-2期
关键词
photosensitive; hybrid sol-gel glass; UV photolithography; high energy beam sensitive glass gray scale mask; diffractive lens;
D O I
10.1016/S0928-4931(01)00282-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hybrid sol-gel glasses, which combine the attractive features of organic polymers with those of inorganic glasses, are desirable materials for integrated optics. In this work, the synthesis and properties of an ultraviolet photosensitive hybrid sot-gel glass films are demonstrated. Multilevel diffractive lens in sol-gel film fabricated with a simple way of UV photolithography using a gray-scale mask is reported. The effects of UV light exposure and heat treatment on the properties of the film are also studied. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:99 / 102
页数:4
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