Photopatternable Polymeric Membranes for Optical Oxygen Sensors

被引：13

作者：

Ambekar, Raghu

Park, Jongwon ^{[1
]}

Henthorn, David B. ^{[2
]}

Kim, Chang-Soo ^{[1
,3
]}

机构：

[1] Missouri Univ Sci & Technol, Dept Elect & Comp Engn, Rolla, MO 65409 USA

[2] Missouri Univ Sci & Technol, Dept Chem & Biol Engn, Rolla, MO 65409 USA

[3] Missouri Univ Sci & Technol, Dept Biol Sci, Rolla, MO 65409 USA

来源：

IEEE SENSORS JOURNAL | 2009年 / 9卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

Fluidics; oxygen; porphyrin; ruthenium; silicone; WAVE-GUIDES; INTEGRATION;

D O I：

10.1109/JSEN.2008.2011069

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new class of optical oxygen sensor that can he photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.

引用

页码：169 / 175

页数：7

共 11 条

[1] DETERMINATION OF OXYGEN CONCENTRATIONS BY LUMINESCENCE QUENCHING OF A POLYMER-IMMOBILIZED TRANSITION-METAL COMPLEX [J].