Characterization of CuGaSe2 thin films grown by MOCVD

被引:7
作者
Orsal, G [1 ]
Romain, N [1 ]
Artaud, MC [1 ]
Duchemin, S [1 ]
机构
[1] Univ Montpellier 2, Ctr Elect & Microoptoelect Montpellier, F-34095 Montpellier 05, France
关键词
CuGaSe2; thin films; MOCVD characterizations;
D O I
10.1109/16.792003
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
CuGaSe2 thin films have been grown by metalorganic chemical vapor deposition (MOCVD), from three organometallic precursors. Samples of about 1-2 mu m thick are codeposited onto Pyrex and Mo-coated soda lime glass, A large range of compositions was investigated and characterized, Stoichiometric CuGaSe2 thin films are single-phased and their optical bandgap is about 1.68 eV, The features of the films are presented in relation with their composition. XRD spectra always exhibit a preferential orientation along the (112) plane. Secondary phases have been observed: Cu Se for Cu-rich films, CuGa3Se5 for Ga-rich films. Observation of the morphology reveals larger polyhedral grains for Cu-rich films becoming platelet-shaped and tilted for Ga-rich compounds. The optical properties are also sensitive to the compositional changes and related to the eventual presence of binary phases. The gap increases with the Ga-content, The CuGa3Se5 phase exhibit a gap of about 1.85 eV, All the samples have a p-type conductivity.
引用
收藏
页码:2098 / 2102
页数:5
相关论文
共 32 条
[1]   COMPOSITION-STRUCTURE RELATIONSHIPS FOR MULTISOURCE EVAPORATED CUGASE2 THIN-FILMS [J].
ALBIN, D ;
NOUFI, R ;
TUTTLE, J ;
GORAL, J ;
RISBUD, SH .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) :4903-4908
[2]   CUGASE2 THIN-FILMS FOR PHOTOVOLTAIC APPLICATIONS [J].
ARNDT, W ;
DITTRICH, H ;
SCHOCK, HW .
THIN SOLID FILMS, 1985, 130 (3-4) :209-216
[3]   CuInSe2 thin films grown by MOCVD:: characterization, first devices [J].
Artaud, MC ;
Ouchen, F ;
Martin, L ;
Duchemin, S .
THIN SOLID FILMS, 1998, 324 (1-2) :115-123
[4]  
BAUKNECHT A, 1997, 11 I PHYS C SER, V152, P269
[5]   HETEROEPITAXY AND CHARACTERIZATION OF CUGASE2 LAYERS GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
CHICHIBU, S ;
HARADA, Y ;
UCHIDA, M ;
WAKIYAMA, T ;
MATSUMOTO, S ;
SHIRAKATA, S ;
ISOMURA, S ;
HIGUCHI, H .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (05) :3009-3015
[6]   Improved quality of CuGaSe2 and CuAlSe2 epilayers grown on CuGa0.96In0.04Se2 substrates [J].
Chichibu, S ;
Nakanishi, H ;
Shirakata, S ;
Isomura, S ;
Miyake, H ;
Sugiyama, K .
APPLIED PHYSICS LETTERS, 1997, 71 (04) :533-535
[7]   Defect chalcopyrite Cu(In1-xGax)(3)Se-5 polycrystalline thin-film materials [J].
Contreras, MA ;
Wiesner, H ;
Matson, R ;
Tuttle, J ;
Ramanathan, K ;
Noufi, R .
THIN FILMS FOR PHOTOVOLTAIC AND RELATED DEVICE APPLICATIONS, 1996, 426 :243-244
[8]  
CONTRERAS MA, 1997, 14 EUR PHOT SOL EN C, P2354
[9]  
DITTRICH H, 1991, SPRINGER P PHYS, V54, P432
[10]  
DUBROWSKI GB, 1963, SOV PHYS-SOLID STATE, V4, P11