Molecular dynamics simulations of surface modification and damage formation by gas cluster ion impacts

被引：31

作者：

Aoki, T ^{[1
]}

Matsuo, J ^{[1
]}

机构：

[1] Kyoto Univ, Quantum Sci & Engn Ctr, Kyoto, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2006年 / 242卷 / 1-2期

关键词：

molecular dynamics; cluster ion beam; damage formation;

D O I：

10.1016/j.nimb.2005.09.011

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Damage formation process by gas cluster impact was studied using molecular dynamics simulations. At gas clusters with various sizes (several tens to several thousand) and energies (several to several tens keV, totally) were irradiated on Si substrates. The relationship between mean damage depth, incident energy and cluster size was examined and the model and conditions to cause damage by cluster impact were discussed. (c) 2005 Published by Elsevier B.V.

引用

页码：517 / 519

页数：3

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