Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

被引：39

作者：

Xu, Z ^{[1
]}

Daga, A ^{[1
]}

Chen, H ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 23期

关键词：

D O I：

10.1063/1.1424072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures. (C) 2001 American Institute of Physics.

引用

页码：3782 / 3784

页数：3

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