Controlled growth and characteristics of single-phase Cu2O and CuO films by pulsed laser deposition

被引:242
作者
Chen, Aiping [1 ]
Long, Hua [1 ]
Li, Xiangcheng [1 ]
Li, Yuhua [1 ]
Yang, Guang [1 ]
Lu, Peixiang [1 ]
机构
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金;
关键词
Copper oxide thin films; Pulsed laser deposition; X-ray diffraction; Optical properties; OXIDE THIN-FILMS; STRUCTURAL-PROPERTIES; SOLAR-CELLS; COPPER; EVAPORATION; OXIDATION;
D O I
10.1016/j.vacuum.2008.10.003
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Copper oxide, Cu2O and CuO, thin films have been synthesized on Si (100) substrates using pulsed laser deposition method. The influences of substrate temperature and oxygen pressure on the structural properties of copper oxide films were discussed. The X-ray diffraction results Show that the structure of the films changes from Cu2O to CuO phase with the increasing of the oxygen pressure. It is also found that the (200) and (111) preferred Cu2O films can be modified by changing substrate temperature. The formation of Cu2O and CuO films are further identified by Fourier transform infrared spectroscopy. For the Cu2O Films, X-ray photoelectron spectroscopic studies indicate the presence of CuO on the surface. In addition, the optical gaps of Cu2O and CuO films have been determined by measuring the transmittance and reflectance spectra. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:927 / 930
页数:4
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