Aerosol deposition of ceramic thick films at room temperature: Densification mechanism of ceramic layers

被引：481

作者：

Akedo, Jun ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba 3058564, Japan

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2006年 / 89卷 / 06期

关键词：

D O I：

10.1111/j.1551-2916.2006.01030.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel method for depositing ceramic thick films by aerosol deposition (AD) is presented. Submicron ceramics particles are accelerated by gas flow up to 100-500 m/s and then impacted on a substrate, to form a dense, uniform and hard ceramic layer at room temperature. However, actual deposition mechanism has not been clarified yet. To clarify densification mechanism during AD, a mixed aerosol of alpha-Al2O3 and Pb(Zr, Ti)O-3 powder was deposited to form a composite layer in this study. The cross-section of the layer was observed by HR-TEM to investigate the densification and bonding mechanism of ceramic particles. As a result, a plastic deformation of starting ceramic particles at room temperature was observed.

引用

页码：1834 / 1839

页数：6