A single-crystal silicon vibrating ring gyroscope

被引：78

作者：

He, GH ^{[1
]}

Najafi, K ^{[1
]}

机构：

[1] Univ Michigan, Ctr Wireless Integrated MicroSyst, Ann Arbor, MI 48109 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

gyroscope; inertial; silicon-on-glass;

D O I：

10.1109/MEMSYS.2002.984371

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a high-performance vibrating ring gyroscope fabricated in (111) oriented single-crystal silicon (SCS). High-performance microgyroscopes are needed in many applications, including inertial navigation, control, and defense/avionics/space. The ring gyroscope provides a number of advantages, including excellent mode matching, high-re solution, low zero-rate output, and long-term stability. In this paper, a SCS vibrating ring gyroscope with high aspect ratio silicon on glass structure was designed, fabricated and tested. The ring, is 2.7mm in diameter and 150mum thick. The gyro has the following measured performance: high Q (12000), good non-linearity (0.02%), large sensitivity (132 mV/degrees/sec), low output noise (10.4degrees/hr/rootHz) and high resolution (7.2degrees/hr). The maximum bias shift is less than +/-1degrees/sec over 10 hours without thermal control.

引用

页码：718 / 721

页数：4

共 6 条

[1]

AYAZI F, 2000, SOL STAT SENS ACT WO, P289

[2]

Bernstein J., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P143, DOI 10.1109/MEMSYS.1993.296932

[3] A new silicon rate gyroscope [J].

Geiger, W ;

Folkmer, B ;

Merz, J ;

Sandmaier, H ;

Lang, W .

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :615-620

[4]

Kim J, 2001, TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P662

[5]

Putty M. W., 1994, SOL STAT SENS ACT WO, P213

[6]

TANG TK, 1996, SOL STAT SENS ACT WO, P288

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