Axial energy spread measurements of an accelerated positive ion beam

被引：12

作者：

Lee, Y

Gough, RA

Kunkel, WB

Leung, KN

Perkins, LT

Pickard, DS

Sun, L

Vujic, J

Williams, MD

Wutte, D

Mondelli, AA

Stengl, G

机构：

[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

[2] ADV LITHOG GRP,COLUMBIA,MD 21045

[3] IONEN MIKROFABRIKAT SYST GMBH,IMS,VIENNA,AUSTRIA

[4] UNIV CALIF BERKELEY,DEPT NUCL ENGN,BERKELEY,CA 94720

[5] SCI APPLICAT INT CORP,MCLEAN,VA 22102

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1997年 / 385卷 / 02期

关键词：

D O I：

10.1016/S0168-9002(96)00936-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A multicusp ion source has been designed for use in ion projection lithography. Longitudinal energy spreads of the extracted positive hydrogen ion beam have been studied using a retarding field energy analyzer, It has been found that the filament-discharge multicusp ion source can deliver a beam with an energy spread less than 3 eV which is required for the ALG-1000 machine. The multicusp ion source can also deliver the current required for the application.

引用

页码：204 / 208

页数：5

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