Ultrasonic micromachining on Al thin film using atomic force microscopy combined quartz crystal resonator

We have developed a novel micro-mechanical modification by combining a quartz crystal resonator and an atomic force microscope which has a very sharp diamond tip mounted on the end of a cantilever. The sample is deposited on the surface of AT-cut quartz crystal resonator which is able to oscillate the surface laterally at its resonance frequency of 5 MHz. The surfaces of the evaporated Al thin films were scratched with x-y scanning of 3 X 3 mu m(2) with the loading force of 0.3-18.9 mu N, and the topographics of the scratched areas were observed. The hollow areas which were scratched with the surface oscillation were several timer deeper than the areas which were scratched without the surface oscillation. The depths of scratched hollows were dependent on the loading force, the repetition numbers of scanning scratches and scanning speed. (C) 1997 Elsevier Science S.A.