Influence of substrate temperature on the composition and structural properties of electron beam evaporated V2O5 thin films

被引：18

作者：

Ramana, CV ^{[1
]}

Hussain, OM ^{[1
]}

Naidu, BS ^{[1
]}

Reddy, PJ ^{[1
]}

机构：

[1] SRI VENKATESWARA UNIV,DEPT PHYS,THIN FILM LAB,TIRUPATI 517502,ANDHRA PRADESH,INDIA

来源：

VACUUM | 1997年 / 48卷 / 05期

关键词：

D O I：

10.1016/S0042-207X(96)00304-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of vanadium pentoxide prepared by electron beam evaporation at different substrate temperatures were characterized by studying their structure and composition. The influence of the deposition temperature on the composition and structure of the films and the effect of heat treatment in an oxygen atmosphere were studied in detail and the deposition conditions were optimised to yield layered type V2O5 thin films. (C) 1997 Elsevier Science Ltd.

引用

页码：431 / 434

页数：4

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