Optical and structural characterization of rf sputtered CeO2 thin films

被引:54
作者
Bueno, RM
MartinezDuart, JM
HernandezVelez, M
Vazquez, L
机构
[1] CSIC,INST CIENCIA MAT,MADRID,SPAIN
[2] ISP,DPTO FIS,HAVANA,CUBA
关键词
D O I
10.1023/A:1018509007844
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The optical and structural properties of r.f. sputtered CeO2 thin films deposited on Pyrex substrates have been studied as a function of substrate temperature during deposition. The refractive index, n, extinction coefficient, k, and bandgap of the films were calculated from reflectance, R, and transmittance, T, spectra in the wavelength range 340-900 nm. The refractive index of CeO2 films at 550 nm comprises values from about 2.25-2.4 depending on the substrate temperature during deposition. The extinction coefficient was negligible for wavelength values higher than 400 nm. The value obtained for the bandgap was 3.1 eV. The X-ray diffraction patterns showed the same (fcc) cubic structure with preferential orientation depending on substrate temperature during deposition. The scanning force microscope measurements showed that the roughness and grain size of the CeO2 films increase with increasing substrate temperature.
引用
收藏
页码:1861 / 1865
页数:5
相关论文
共 9 条
  • [1] OPTICAL-PROPERTIES OF ION ASSISTED DEPOSITED CEO2 FILMS
    ALROBAEE, MS
    KRISHNA, MG
    RAO, KN
    MOHAN, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06): : 3048 - 3053
  • [2] INFLUENCE OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF OXYGEN-ION-ASSISTED DEPOSITED CEO2 FILMS
    ALROBAEE, MS
    RAO, KN
    MOHAN, S
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) : 2380 - 2386
  • [3] MULTIPLE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILM COATING MATERIALS
    ARNDT, DP
    AZZAM, RMA
    BENNETT, JM
    BORGOGNO, JP
    CARNIGLIA, CK
    CASE, WE
    DOBROWOLSKI, JA
    GIBSON, UJ
    HART, TT
    HO, FC
    HODGKIN, VA
    KLAPP, WP
    MACLEOD, HA
    PELLETIER, E
    PURVIS, MK
    QUINN, DM
    STROME, DH
    SWENSON, R
    TEMPLE, PA
    THONN, TF
    [J]. APPLIED OPTICS, 1984, 23 (20): : 3571 - 3596
  • [4] BUENO RM, 1995, J VAC SCI TECHNOL A, V13, P1
  • [5] CONDUCTION IN NON-CRYSTALLINE SYSTEMS .5. CONDUCTIVITY, OPTICAL ABSORPTION AND PHOTOCONDUCTIVITY IN AMORPHOUS SEMICONDUCTORS
    DAVIS, EA
    MOTT, NF
    [J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (179): : 903 - &
  • [6] GROWTH OF (110)-ORIENTED CEO2 LAYERS ON (100) SILICON SUBSTRATES
    INOUE, T
    OHSUNA, T
    LUO, L
    WU, XD
    MAGGIORE, CJ
    YAMAMOTO, Y
    SAKURAI, Y
    CHANG, JH
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (27) : 3604 - 3606
  • [7] LOW-TEMPERATURE EPITAXIAL-GROWTH OF CERIUM DIOXIDE LAYERS ON (111) SILICON SUBSTRATES
    INOUE, T
    OSONOE, M
    TOHDA, H
    HIRAMATSU, M
    YAMAMOTO, Y
    YAMANAKA, A
    NAKAYAMA, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (12) : 8313 - 8315
  • [8] PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION
    NETTERFIELD, RP
    SAINTY, WG
    MARTIN, PJ
    SIE, SH
    [J]. APPLIED OPTICS, 1985, 24 (14): : 2267 - 2272
  • [9] INFRARED-SPECTRA OF MIXED-OXIDE THIN-FILMS CONTAINING GROUP-IV OXIDES WITH CEO2 - A COMPARATIVE-STUDY
    SINGH, A
    DAVIS, EA
    GURMAN, SJ
    HOGARTH, CA
    [J]. JOURNAL OF MATERIALS SCIENCE, 1989, 24 (07) : 2623 - 2627