Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis

被引：50

作者：

Nunes, P ^{[1
]}

Fortunato, E ^{[1
]}

Lopes, A ^{[1
]}

Martins, R ^{[1
]}

机构：

[1] Univ Nova Lisboa, Fac Sci & Technol, CENIMAT, Dept Mat Sci, P-2825114 Caparica, Portugal

来源：

INTERNATIONAL JOURNAL OF INORGANIC MATERIALS | 2001年 / 3卷 / 08期

关键词：

gas sensors; zinc oxide; spray pyrolysis; thin films;

D O I：

10.1016/S1466-6049(01)00136-2

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by spray pyrolysis. It was found that using highly resistive (above 10(4) Omega cm) thin films and by performing the measurements at 200 degreesC a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：1129 / 1131

页数：3

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