Chemical solution routes to single-crystal thin films

被引:366
作者
Lange, FF
机构
[1] Materials Department, University of California, Santa Barbara
关键词
D O I
10.1126/science.273.5277.903
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Epitaxial thin films of inorganic single crystals can be grown on single-crystal substrates with a variety of different solution chemistries. This review emphasizes chemical solution deposition, in which a solution is used to deposit a layer of precursor molecules that decompose to low-density, polycrystalline films during heating. Ways to control film cracking during deposition and heat treatment and why many precursors synthesize metastable crystalline structures are discussed, and the different mechanisms that convert the polycrystalline film into a single crystal are reviewed. Hydrothermal epitaxy, in which single crystal thin films are directly synthesized on templating substrates in an aqueous solution at temperatures <150 degrees C, is also discussed.
引用
收藏
页码:903 / 909
页数:7
相关论文
共 67 条
  • [1] [Anonymous], MRS B
  • [2] METASTABLE PHASE SELECTION AND PARTITIONING IN ZRO2-MGO PROCESSED FROM LIQUID PRECURSORS
    BALMER, ML
    LANGE, FF
    LEVI, CG
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1992, 75 (04) : 946 - 952
  • [3] OBSERVATION OF SOL-GEL SOLID-PHASE EPITAXIAL-GROWTH OF FERROELECTRIC PB(NB,ZR,TI)O3 THIN-FILMS ON SAPPHIRE
    BARLINGAY, CK
    DEY, SK
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (11) : 1278 - 1280
  • [4] FUNDAMENTAL ISSUES IN HETEROEPITAXY - A DEPARTMENT-OF-ENERGY, COUNCIL-ON-MATERIALS-SCIENCE PANEL REPORT
    BAUER, EG
    DODSON, BW
    EHRLICH, DJ
    FELDMAN, LC
    FLYNN, CP
    GEIS, MW
    HARBISON, JP
    MATYI, RJ
    PEERCY, PS
    PETROFF, PM
    PHILLIPS, JM
    STRINGFELLOW, GB
    ZANGWILL, A
    [J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (04) : 852 - 894
  • [5] PRECURSOR-DERIVED COVALENT CERAMICS
    BILL, J
    ALDINGER, F
    [J]. ADVANCED MATERIALS, 1995, 7 (09) : 775 - &
  • [6] BIRCHELL JD, 1983, BRIT CERAM TRANS J, V82, P153
  • [7] SOL-GEL-DERIVED PBTIO3
    BLUM, JB
    GURKOVICH, SR
    [J]. JOURNAL OF MATERIALS SCIENCE, 1985, 20 (12) : 4479 - 4483
  • [8] BORNSIDE DE, 1987, J IMAGING TECHNOL, V13, P122
  • [9] THE PROCESSES OF FORMATION AND EPITAXIAL ALIGNMENT OF SRTIO3 THIN-FILMS PREPARED BY METALLOORGANIC DECOMPOSITION
    BRAUNSTEIN, G
    PAZPUJALT, GR
    MASON, MG
    BLANTON, T
    BARNES, CL
    MARGEVICH, D
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 73 (02) : 961 - 970
  • [10] BUSCH JR, 1992, MATER RES SOC P S, V243, P533