All-Solid-State Batteries: A Challenging Route Towards 3D Integration

被引：6

作者：

Donders, M. E. ^{[1
,2
]}

Oudenhoven, J. F. M. ^{[2
]}

Baggetto, L. ^{[2
]}

Knoops, H. C. M. ^{[1
,2
]}

van de Sanden, M. C. M. ^{[2
]}

Kessels, W. M. M. ^{[2
]}

Notten, P. H. L. ^{[2
]}

机构：

[1] Mat Innovat Inst M2i, POB 5008, NL-2600 GA Delft, Netherlands

[2] Eindhoven Univ Technol, Eindhoven, Netherlands

来源：

ATOMIC LAYER DEPOSITION APPLICATIONS 6 | 2010年 / 33卷 / 02期

关键词：

ELECTROLYTE THIN-FILMS; OXIDE;

D O I：

10.1149/1.3485258

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Current trends in device miniaturization and portability put strong requirements on energy storage devices with a high power to volume ratio. Li-ion all-solid-state batteries are very attractive as they combine a high storage capacity with the possibility of a flexible design and a longer lifespan than comparable battery technologies. As these storage devices approach the nano-scale, thin film conformal deposition techniques (such as PVD, (LP) CVD and ALD) become increasingly important. In this paper an outlook is given on the challenging route towards 3D integrated all-solid-state batteries and materials are suggested and discussed for each individual layer of a battery stack.

引用

页码：213 / 222

页数：10