Magnetic induction machines integrated into bulk-micromachined silicon

被引：19

作者：

Arnold, DP

Das, S

Cros, F

Zana, I

Allen, MG

Lang, JH

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[3] MIT, Lab Elect & Elect Syst, Cambridge, MA 02139 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2006年 / 15卷 / 02期

基金：

美国国家科学基金会;

关键词：

AC generators; induction machines; magnetic materials; MEMS; micromachining;

D O I：

10.1109/JMEMS.2006.873951

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 mu N-m.

引用

页码：406 / 414

页数：9

共 27 条

[1] Planar variable reluctance magnetic micromotor with fully integrated stator and coils [J].