Er doped nanocrystalline ZnO planar waveguide structures for 1.55 μm amplifier applications

被引:80
作者
Mais, N [1 ]
Reithmaier, JP
Forchel, A
Kohls, M
Spanhel, L
Müller, G
机构
[1] Univ Wurzburg, D-97074 Wurzburg, Germany
[2] Univ Wurzburg, Lehrstuhl Silicatchem, D-97070 Wurzburg, Germany
关键词
D O I
10.1063/1.124897
中图分类号
O59 [应用物理学];
学科分类号
摘要
Amplifying planar waveguide structures in Er-doped nanocrystalline II/VI semiconductor layer systems were developed by photolithography and wet chemical etching. 2 mu m thick planar waveguides on glass substrates with lateral dimensions down to 5 mu m with rectangular cross section were realized. By optical excitation a maximum gain of 82 cm(-1) could be determined, which is sufficiently high to allow the design of compact planar amplifiers in this material system. The influence of a thermal sintering step on the gain spectrum and on the fluorescence lifetime has been investigated. By increasing the sintering temperature to 800 degrees C a consistent increase of gain and fluorescence lifetime was observed. (C) 1999 American Institute of Physics. [S0003-6951(99)03240-4].
引用
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页码:2005 / 2007
页数:3
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