An instrument for 3D x-ray nano-imaging

被引：80

作者：

Holler, M. ^{[1
]}

Raabe, J. ^{[1
]}

Diaz, A. ^{[1
]}

Guizar-Sicairos, M. ^{[1
]}

Quitmann, C. ^{[1
]}

Menzel, A. ^{[1
]}

Bunk, O. ^{[1
]}

机构：

[1] Paul Scherrer Inst, CH-5232 Villigen, Switzerland

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 07期

关键词：

MICROSCOPY; TOMOGRAPHY; RESOLUTION;

D O I：

10.1063/1.4737624

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present an instrument dedicated to 3D scanning x-ray microscopy, allowing a sample to be precisely scanned through a beam while the angle of x-ray incidence can be changed. The position of the sample is controlled with respect to the beam-defining optics by laser interferometry. The instrument achieves a position stability better than 10 nm standard deviation. The instrument performance is assessed using scanning x-ray diffraction microscopy and we demonstrate a resolution of 18 nm in 2D imaging of a lithographic test pattern while the beam was defined by a pinhole of 3 mu m in diameter. In 3D on a test object of copper interconnects of a microprocessor, a resolution of 53 nm is achieved. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4737624]

引用

页数：7

共 34 条

[1]

Andrews J C, 2008, Synchrotron Radiat News, V21, P17, DOI 10.1080/08940880802123043

[2] Chemical Contrast in Soft X-Ray Ptychography [J].

Beckers, Mike ;

Senkbeil, Tobias ;

Gorniak, Thomas ;

Reese, Michael ;

Giewekemeyer, Klaus ;

Gleber, Sophie-Charlotte ;

Salditt, Tim ;

Rosenhahn, Axel .

PHYSICAL REVIEW LETTERS, 2011, 107 (20)

[3] Soft X-ray microscopy at a spatial resolution better than 15nm [J].

Chao, WL ;

Harteneck, BD ;

Liddle, JA ;

Anderson, EH ;

Attwood, DT .

NATURE, 2005, 435 (7046) :1210-1213

[4] Quantitative x-ray phase nanotomography [J].

Diaz, Ana ;

Trtik, Pavel ;

Guizar-Sicairos, Manuel ;

Menzel, Andreas ;

Thibault, Pierre ;

Bunk, Oliver .

PHYSICAL REVIEW B, 2012, 85 (02)

[5] Ptychographic X-ray computed tomography at the nanoscale [J].

Dierolf, Martin ;

Menzel, Andreas ;

Thibault, Pierre ;

Schneider, Philipp ;

Kewish, Cameron M. ;

Wepf, Roger ;

Bunk, Oliver ;

Pfeiffer, Franz .

NATURE, 2010, 467 (7314) :436-U82

[6] Quantitative biological imaging by ptychographic x-ray diffraction microscopy [J].

Giewekemeyer, Klaus ;

Thibault, Pierre ;

Kalbfleisch, Sebastian ;

Beerlink, Andre ;

Kewish, Cameron M. ;

Dierolf, Martin ;

Pfeiffer, Franz ;

Salditt, Tim .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2010, 107 (02) :529-534

[7] Phase tomography from x-ray coherent diffractive imaging projections [J].

Guizar-Sicairos, Manuel ;

Diaz, Ana ;

Holler, Mirko ;

Lucas, Miriam S. ;

Menzel, Andreas ;

Wepf, Roger A. ;

Bunk, Oliver .

OPTICS EXPRESS, 2011, 19 (22) :21345-21357

[8] PILATUS: A single photon counting pixel detector for X-ray applications [J].

Henrich, B. ;

Bergamaschi, A. ;

Broennimann, C. ;

Dinapoli, R. ;

Eikenberry, E. F. ;

Johnson, I. ;

Kobas, M. ;

Kraft, P. ;

Mozzanica, A. ;

Schmitt, B. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 607 (01) :247-249

[9] Full optical characterization of coherent x-ray nanobeams by ptychographic imaging [J].

Hoenig, Susanne ;

Hoppe, Robert ;

Patommel, Jens ;

Schropp, Andreas ;

Stephan, Sandra ;

Schoeder, Sebastian ;

Burghammer, Manfred ;

Schroer, Christian G. .

OPTICS EXPRESS, 2011, 19 (17) :16324-16329

[10] Zone-doubling technique to produce ultrahigh-resolution x-ray optics [J].

Jefimovs, K. ;

Vila-Comamala, J. ;

Pilvi, T. ;

Raabe, J. ;

Ritala, M. ;

David, C. .

PHYSICAL REVIEW LETTERS, 2007, 99 (26)

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