Macroporous silicon photonic crystals at 1.55μm

被引:17
作者
Rowson, S [1 ]
Chelnokov, A [1 ]
Lourtioz, JM [1 ]
机构
[1] Univ Paris Sud, Inst Elect Fondamentale, CNRS, UMR 8622, F-91405 Orsay, France
关键词
D O I
10.1049/el:19990497
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The limits of macroporous silicon etching are pushed a step further to obtain a complete photonic bandgap centred at 1.55 mu m wavelength. A submicrometre period triangular photonic crystal of air holes is etched over a large area of silicon and is characterised by absolute reflection measurements for two propagation directions and both polarisations. The large area covered and the quality of the photonic crystal obtained demonstrate the feasibility of realising high density integrated devices at telecommunication wavelengths.
引用
收藏
页码:753 / 755
页数:3
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