Growth temperature effect on structural and morphological properties of ''Spray'' In2S3 thick films

被引：24

作者：

Bouguila, N

Bouzouita, H

Lacaze, E

Amara, AB

Bouchriha, H

Dhouib, A

机构：

[1] UNIV PARIS 06, PHYS SOLIDES GRP, F-75005 PARIS, FRANCE

[2] UNIV PARIS 07, PHYS SOLIDES GRP, F-75005 PARIS, FRANCE

[3] FAC SCI, BIZERTE, TUNISIA

[4] FAC SCI TUNIS, LPMC, TUNIS 1060, TUNISIA

来源：

JOURNAL DE PHYSIQUE III | 1997年 / 7卷 / 08期

关键词：

D O I：

10.1051/jp3:1997214

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have investigated the substrate temperature effect on Structural and morphological properties of thick layers deposited on glass substrate by spray method. X-ray diffraction has shown that the In2S3 is the main phase present in these films and that the structure and the allotropic form of this phase are affected by the substrate temperature. Analysis of these layers by Scanning Electronic Microscopy (SEM) and by Atomic Force Microscopy (AFM) revealed that a best crystallinity and homogeneity are approximately obtained for T-s = 613 K.

引用

页码：1647 / 1660

页数：14

共 35 条

[1] GROWTH OF IN(2)S(3) THIN-FILMS BY ATOMIC LAYER EPITAXY [J].