Structural and mechanical properties of multilayered gradient CrN/ZrN coatings

被引：30

作者：

Li, DJ ^{[1
]}

Liu, F ^{[1
]}

Wang, MX ^{[1
]}

Zhang, JJ ^{[1
]}

Liu, QX ^{[1
]}

机构：

[1] Tianjin Normal Univ, Coll Phys & Elect Informat Sci, Tianjin 300074, Peoples R China

来源：

THIN SOLID FILMS | 2006年 / 506卷

关键词：

magnetron sputtering; CrN/ZrN coating; nanoindentation; nanoscratch;

D O I：

10.1016/j.tsf.2005.08.031

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Multilayered gradient CrN/ZrN coatings were synthesized by a dual cathode dc magnetron sputtering. The influence of species of reaction gases and partial pressures on structural and mechanical properties was explored. Both nanoindentation and nanoscratch fracture tests showed that multilayered gradient coatings possessed much higher hardness and fracture resistance than monolithic ZrN and CrN coatings. A proper percent of NE3 in N-2 reaction gas was proved to be of benefit to the synthesis of high hardness and fracture-resistant CrN/ZrN coatings with strong adhesion to substrate. The hardness and critical fracture load exceed 55 GPa and 100 mN, respectively. The multilayered gradient structure with strongly mixed CrN(111), Cr2N(112), ZrN(111), and ZrN(220) orientations is responsible for the enhanced mechanical properties. (c) 2005 Published by Elsevier B.V.

引用

页码：202 / 206

页数：5

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