Electrowetting and electrowetting-on-dielectric for microscale liquid handling

被引:530
作者
Lee, J [1 ]
Moon, H
Fowler, J
Schoellhammer, T
Kim, CJ
机构
[1] Northwestern Univ, Dept Mech Engn, Evanston, IL 60091 USA
[2] Univ Calif Los Angeles, Dept Mech & Aerosp Engn, Los Angeles, CA 90095 USA
[3] Univ Calif Los Angeles, Dept Comp Sci, Los Angeles, CA 90095 USA
基金
美国国家科学基金会;
关键词
electrowetting; electrowetting-on-dielectric; wettability; surface tension; liquid-solid surface interface; microfluidic devices;
D O I
10.1016/S0924-4247(01)00734-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper deals with electrowetting (EW) and electrowetting-on-dielectric (EWOD) principles applied to microfluidic devices. EW and EWOD are principles that can control wettability of liquids on solid surfaces using electric potential. While EW is controlling wettability of a certain electrolyte on a metal electrode by varying electric energy across the electrical double layer (EDL), EWOD applies to virtually any aqueous liquid by varying electric energy across the thin dielectric film between the liquid and conducting substrate. These driving mechanisms have many advantages. By electrically changing the wettability of each of the electrode patterns on a surface, a liquid on these electrodes can be shaped and driven along the active electrodes, making microfluidics extremely simple both for device fabrication and operation, It is also worth noting that, driven by surface tension, the mechanism becomes more effective as the size of the device becomes smaller. This paper describes fundamental concepts and the proof-of-concept experiments, modeling and design, microfabrication processes, and initial testing results for the microfluidic devices based on the EW and EWOD principles. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:259 / 268
页数:10
相关论文
共 14 条
  • [1] ADAM NK, 1941, PHYSICS CHEM SURFACE
  • [2] CONTINUOUS ELECTRO-WETTING EFFECT
    BENI, G
    HACKWOOD, S
    JACKEL, JL
    [J]. APPLIED PHYSICS LETTERS, 1982, 40 (10) : 912 - 914
  • [3] Valveless pumping using traversing vapor bubbles in microchannels
    Jun, TK
    Kim, CJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1998, 83 (11) : 5658 - 5664
  • [4] A theoretical study of instabilities at the advancing front of thermally driven coating films
    Kataoka, DE
    Troian, SM
    [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1997, 192 (02) : 350 - 362
  • [5] Surface-tension-driven microactuation based on continuous electrowetting
    Lee, J
    Kim, CJ
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (02) : 171 - 180
  • [6] Lee J., 1999, P ASME INT MECH ENG, P397
  • [7] Lippmann G., 1875, Ann. Chim. Phys, V5, P494
  • [8] Microfabricated capillarity-driven stop valve and sample injector
    Man, PF
    Mastrangelo, CH
    Burns, MA
    Burke, DT
    [J]. MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 45 - 50
  • [9] Matsumoto H., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P105, DOI 10.1109/MEMSYS.1990.110258
  • [10] Electrowetting-based actuation of liquid droplets for microfluidic applications
    Pollack, MG
    Fair, RB
    Shenderov, AD
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (11) : 1725 - 1726