Field emission properties of ta-C films with nitrogen doping

被引：8

作者：

Park, KC

Moon, JH

Chung, SJ

Jung, JH

Ju, BK

Oh, MH

Milne, WI

Han, MK

Jang, J

机构：

[1] Department of Physics, Kyung Hee University, Dongdaemoon-ku

[2] Korea Inst. of Sci. and Technology, Seoul

[3] University of Cambridge, Cambridge CB2 1PZ, Trumpington Street

[4] School of Electrical Engineering, Seoul National University, Seoul

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.589332

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C. (C) 1997 American Vacuum Society.

引用

页码：431 / 433

页数：3

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[2]

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