Novel equipment for friction force measurement on MEMS and micro components

被引：9

作者：

Schmidt, M ^{[1
]}

Wortmann, A ^{[1
]}

Lüthje, H ^{[1
]}

Büttgenbach, S ^{[1
]}

机构：

[1] Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany

来源：

MEMS DESIGN, FABRICATION, CHARACTERIZATION, AND PACKAGING | 2001年 / 4407卷

关键词：

friction; micro actuator; tester; measurement system;

D O I：

10.1117/12.425297

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The importance of micro actuators will increase dramatically in the near future. Micro actuators are only capable of generating low forces, therefore surfaces in dynamic contact must be tribologically optimized. Since component and thin film properties may differ from their bulk material behaviour and in order to investigate the influence of the components' geometries, it is important to investigate the effect of friction in micro actuators under comparable test conditions. To enable such in-situ investigations two testing units have been designed and built up at the IMT and IST. We report on the design of these devices.

引用

页码：158 / 163

页数：6

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