Membrane mirrors for vision science adaptive optics

被引:4
作者
Kurczynski, P [1 ]
Tyson, JA [1 ]
Sadoulet, B [1 ]
Bishop, D [1 ]
Williams, DR [1 ]
机构
[1] Lucent Technol, Bell Labs, Murray Hill, NJ 07049 USA
来源
MOEMS AND MINIATURIZED SYSTEMS II | 2001年 / 4561卷
关键词
adaptive optics; MEMS; MOEMS; optical MEMS; micromirrors; deformable mirrors; ocular aberrations;
D O I
10.1117/12.443108
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Adaptive optics provides a means to measure and correct aberrations in human vision. This technology is being used to diagnose vision problems, study the mechanism of human vision, and extend the capabilities of nature's optics. The ideal wavefront corrector for vision science adaptive optics would have greater stroke, and more degrees of freedom than is currently available. Micromachined deformable mirrors may soon meet these demands. Membrane mirrors in particular offer a promising alternative to other MEMS deformable mirror designs. A new type of mirror, employing a bound charge layer on the membrane, may overcome some of the limitations of previous membrane mirrors.
引用
收藏
页码:147 / 162
页数:16
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