A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

被引：21

作者：

Cho, IJ ^{[1
]}

Yun, KS ^{[1
]}

Lee, HK ^{[1
]}

Yoon, JB ^{[1
]}

Yoon, E ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn & Comp Sci, Yusong Gu, Taejon 305701, South Korea

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984328

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as +/-4.35degrees for x-axis actuation and +/-15.7degrees for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.

引用

页码：540 / 543

页数：4

共 9 条

[1]

BHALOTRA SR, 2000, OPTICAL MEMS 2000, P93

[2]

CONTANT RA, 1999, TRANSDUCERS 99, P376

[3]

GOLDSTEIN EL, 2000, OPTICAL MEMS 2000, P27

[4] Magnetically actuated, addressable microstructures [J].

Judy, JW ;

Muller, RS .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (03) :249-256

[5] Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners [J].

Kiang, MH ;

Solgaard, O ;

Muller, RS ;

Lau, KY .

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :192-197

[6]

KIM TS, 2001, OPTICAL MEMS 2001, P99

[7] Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control [J].

Liu, C ;

Tsao, T ;

Lee, GB ;

Leu, JTS ;

Yi, YW ;

Tai, YC ;

Ho, CM .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 78 (2-3) :190-197

[8] A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges [J].

Miyajima, H ;

Asaoka, N ;

Arima, M ;

Minamoto, Y ;

Murakami, K ;

Tokuda, K ;

Matsumoto, K .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (03) :418-424

[9] Electrostatic micro torsion mirrors for an optical switch matrix [J].

Toshiyoshi, H ;

Fujita, H .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1996, 5 (04) :231-237

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