Molybdenum-doped indium oxide transparent conductive thin films

被引：79

作者：

Meng, Y ^{[1
]}

Yang, XL ^{[1
]}

Chen, HX ^{[1
]}

Shen, J ^{[1
]}

Jiang, YM ^{[1
]}

Zhang, ZJ ^{[1
]}

Hua, ZY ^{[1
]}

机构：

[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2002年 / 20卷 / 01期

关键词：

D O I：

10.1116/1.1421595

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We developed a novel transparent conductive film, molybdenum-doped indium oxide (IMO). Using normal thermal reactive evaporation without any special treatments, IMO films have been prepared on normal glass microscope slides at about 350degreesC with electrical resistivity of 1.7 X 10(-4) Omega cm, mobility over 100 cm(2) V-1 s(-1), and an average spectral transmittance in the visible region over 80%. From x-ray photoelectron spectroscopy and x-ray diffraction spectra of the IMO films, it is confirmed that the lattice of IMO is the same as that of In2O3 of cubic bixbyite structure, Mo6+ substitutes for In3+ in In2O3, and there are no new compounds in IMO. The valence difference of 3 between Mo6+ and In3+ is of great advantage to the IMO film with high conductivity and high transparency simultaneously. (C) 2002 American Vacuum Society.

引用

页码：288 / 290

页数：3

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