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Evaluation of (Pb, La)(Zr, Ti)O3 (PLZT) capacitors of different film thicknesses with Pt/SrRuO3 top electrodes

被引：18
作者：
Cross, JS
Fujiki, M
Tsukada, M
Matsuura, K
Otani, S
机构：
[1] Fujitsu Labs Ltd, Atsugi, Kanagawa 2430197, Japan
[2] Fujitsu Ltd, Kanegasaki, Iwate 0294593, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1999年 / 38卷 / 4B期
关键词：
SrRuO3; Pt; PZT; CSD; polarization; electrode; ferroelectric; coercive voltage;
D O I：
10.1143/JJAP.38.L448
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
(Pb, La)(Zr, Ti)O-3 [PLZT] films with thicknesses of 150, 225 and 300 nm were prepared by chemical solution deposition (CSD) on Pt/IrO2 coated SiO2/Si wafers. Top electrodes of Pt/SRO were sputter deposited and annealed at 600 degrees C to form a capacitor. All three PLZT films were highly (111) oriented and showed high switchable polarization of >40 mu C.cm(-2) at 200 kV.cm(-1). A coercive field of 40 kV.cm(-1) was observed for all three films regardless of thickness. Little fatigue degradation was observed up to 10(10) cycles. These results indicate that it is possible to combine both oxide and metallic contacts in a high endurance ferroelectric capacitor for low voltage applications.
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收藏
页码：L448 / L450
页数：3
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