Texture evolution and electrical properties of oriented PZT thin films

被引：43

作者：

Chen, SY

机构：

[1] Materials Science and Engineering, University of Michigan, Ann Arbor

来源：

MATERIALS CHEMISTRY AND PHYSICS | 1996年 / 45卷 / 02期

关键词：

texture evolution; electrical properties; PZT thin films;

D O I：

10.1016/0254-0584(96)80095-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The Pb-rich intermetallic phases, Pt5-7Pb and PbO, play an important role in the texture evolution of oriented PZT thin films. Pt5-7Pb is a (111) textured transient intermetallic phase that nucleates PZT [111] texture. PbO is a (001) textured layer compound that nucleates PZT [100] texture. Zr-rich PZT films with a [111] texture have better electrical properties than [100] textured films because of the polarization effect.

引用

收藏

页码：159 / 162

页数：4

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