TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .2. HEAT-TREATMENT AND COMPOSITIONAL EFFECTS

被引:128
作者
CHEN, SY
CHEN, IW
机构
[1] Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan
关键词
Lead zirconate titanate;
D O I
10.1111/j.1151-2916.1994.tb04603.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Texture transition of Pb(Zr1-xTix)O-3 thin films grown from a metallo-organic solution onto Pt/Ti/SiO2/Si substrates has been studied. The orientation obtained depends on the crystallization temperature and time and can be drastically altered by modifying the heat treatment schedule. A [100] texture requires an initial seeding treatment in the intermediate temperature range. This is attributed to a nucleation advantage associated with the formation of an intermediate PbO[001] texture that tends to form at intermediate temperature over time. A [111] texture develops at higher temperature during rapid heating and can be rationalized by the formation of an epitaxial intermetallic phase Pt5-7Pb at the PZT/Pt interface that provides lattice matching between PZT(111), Pt5-7Pb(111), and Pt(111). Temperature-time transformation texture (TTT) diagrams of PZT texture have been constructed for seeding various orientations. The effect of composition (Pb excess and Zr/Ti ratio) and the possible manipulation of these texture selection relations by combining compositional tailoring and heat treatment schedules are illustrated.
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页码:2337 / 2344
页数:8
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