SYNTHESIS OF HIGHLY ORIENTED LEAD ZIRCONATE LEAD TITANATE FILM USING METALLOORGANICS

被引：79

作者：

HIRANO, S

YOGO, T

KIKUTA, K

ARAKI, Y

SAITOH, M

OGASAHARA, S

机构：

[1] Department of Applied Chemistry, School of Engineering, Nagoya University, Nagoya

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1992年 / 75卷 / 10期

关键词：

D O I：

10.1111/j.1151-2916.1992.tb05505.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Crack-free Pb(Zr,Ti)O3 (PZT) thin films with preferred orientation were prepared successfully on MgO (100), SrTiO3 (100), and Pt/Ti/SiO2/Si substrates from metal alkoxide solutions. Calcination of precursor films in a H2O-O2 gas mixture was found to be effective not only for low-temperature crystallization of perovskite PZT, but also for obtaining the preferred orientation of PZT films. Single-phase PZT films with.high preferred orientation were synthesized on MgO (100) and Pt/Ti/SiO2/Si substrates at 550-degrees and 600-degrees-C for 2 h, respectively. The PZT film on the Pt/Ti/SiO2/Si substrate showed a permittivity of 520, tan delta of 0.03, a remanent polarization of 24 muC/cm2, and a coercive field of 54 kV/cm.

引用

页码：2785 / 2789

页数：5

共 17 条

[1] SPUTTER-DEPOSITION OF [111]-AXIS ORIENTED RHOMBOHEDRAL PZT FILMS AND THEIR DIELECTRIC, FERROELECTRIC AND PYROELECTRIC PROPERTIES
ADACHI, M
MATSUZAKI, T
YAMADA, T
SHIOSAKI, T
KAWABATA, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (04): : 550 - 553
[2] Budd K. D., 1985, British Ceramic Proceedings, P107
[3] ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT)
CASTELLANO, RN
FEINSTEIN, LG
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 4406 - 4411
[4] SYNTHESIS AND MICROSTRUCTURE OF HIGHLY ORIENTED LEAD TITANATE THIN-FILMS PREPARED BY A SOL-GEL METHOD
CHEN, CH
RYDER, DF
SPURGEON, WA
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (08) : 1495 - 1498
[5] THIN-FILM FERROELECTRICS OF PZT BY SOL-GEL PROCESSING
DEY, SK
BUDD, KD
PAYNE, DA
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1988, 35 (01) : 80 - 81
[6] PREPARATION OF FERROELECTRIC PZT FILMS BY THERMAL-DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS
FUKUSHIMA, J
KODAIRA, K
MATSUSHITA, T
[J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (02) : 595 - 598
[7] HIRANO S, 1990, MATER RES SOC SYMP P, V200, P3, DOI 10.1557/PROC-200-3
[8] FORMATION OF LINBO3 FILMS BY HYDROLYSIS OF METAL ALKOXIDES
HIRANO, S
KATO, K
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) : 538 - 541
[9] HIRANO S, 1988, ADV CERAM MATER, V3, P503
[10] HIRANO SI, 1987, ADV CERAM MATER, V2, P142

← 1 2 →