Preparation and characterization of a sol-gel prepared ferroelectric sandwich structure

被引:5
作者
Ren, TL [1 ]
Zhang, LT [1 ]
Liu, LT [1 ]
Li, ZJ [1 ]
机构
[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China
关键词
PZT; PT; sandwich structure; sol-gel; ferroelectric properties;
D O I
10.1023/A:1015361413911
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A novel silicon-based PbTiO3/Pb(Zr,Ti)O-3/PbTiO3 (PT/PZT/PT) sandwich structure has been prepared using a sol-gel method. The annealing temperature is greatly reduced compared with those structures without PT layers. Capacitance-voltage (C-V), leakage current-voltage (I-V), polarization-field (P-E), dielectric-frequency response and polarization fatigue of the sandwich structure are examined. The relative dielectric constant, the coercive field and the remanent polarization of the PZT films are measured to be about 900, 18 kV/cm and 16 muC/cm(2) respectively. The current density is less than 5 x 10(-9) A/cm(2) below 200 kV/cm. The dielectric constant of the structure remains constant at low frequency, and decreases to some degree at high frequency. The retained polarization does not change significantly after 8 x 10(9) read/write cycles. The PZT films are proved to have very good dielectric and ferroelectric properties. The new PT/PZT/PT sandwich structure can be valuable for memory devices and other applications.
引用
收藏
页码:271 / 274
页数:4
相关论文
共 10 条
[1]   COMPOSITIONAL CONTROL OF FERROELECTRIC FATIGUE IN PEROVSKITE FERROELECTRIC CERAMICS AND THIN-FILMS [J].
CHEN, J ;
HARMER, MP ;
SMYTH, DM .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (09) :5394-5398
[2]   FATIGUE-FREE FERROELECTRIC CAPACITORS WITH PLATINUM-ELECTRODES [J].
DEARAUJO, CAP ;
CUCHIARO, JD ;
MCMILLAN, LD ;
SCOTT, MC ;
SCOTT, JF .
NATURE, 1995, 374 (6523) :627-629
[3]   Electric fatigue properties of sol-gel-derived Pb(Zr, Ti)O3/PbZrO3 multilayered thin films [J].
Jang, JH ;
Yoon, KH .
APPLIED PHYSICS LETTERS, 1999, 75 (01) :130-132
[4]   Structural and electrical properties of excess PbO doped Pb(Zr0.52Ti0.48)O3 thin films using rf magnetron sputtering method [J].
Kim, TS ;
Kim, DJ ;
Lee, JK ;
Jung, HJ .
JOURNAL OF MATERIALS RESEARCH, 1998, 13 (12) :3436-3441
[5]   LOW-TEMPERATURE PEROVSKITE FORMATION OF LEAD ZIRCONATE TITANATE THIN-FILMS BY A SEEDING PROCESS [J].
KWOK, CK ;
DESU, SB .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (02) :339-344
[6]   FERROELECTRIC MEMORIES [J].
SCOTT, JF ;
DEARAUJO, CAP .
SCIENCE, 1989, 246 (4936) :1400-1405
[7]   SWITCHING KINETICS OF LEAD ZIRCONATE TITANATE SUB-MICRON THIN-FILM MEMORIES [J].
SCOTT, JF ;
KAMMERDINER, L ;
PARRIS, M ;
TRAYNOR, S ;
OTTENBACHER, V ;
SHAWABKEH, A ;
OLIVER, WF .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (02) :787-792
[8]   Low-temperature processing of highly oriented Pb(ZrXTi1-X)O-3 thin film with multi-seeding layers [J].
Suzuki, H ;
Kaneko, S ;
Murakami, K ;
Hayashi, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9B) :5803-5807
[9]   Low-temperature processing of ferroelectric Pb(Zr0.53Ti0.47)O-3 thin film from molecular-designed alkoxide precursor solution [J].
Suzuki, H ;
Othman, MB ;
Murakami, K ;
Kaneko, S ;
Hayashi, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9B) :4896-4899
[10]   ELECTRONIC DOMAIN PINNING IN PB(ZR,TI)O3 THIN-FILMS AND ITS ROLE IN FATIGUE [J].
WARREN, WL ;
DIMOS, D ;
TUTTLE, BA ;
NASBY, RD ;
PIKE, GE .
APPLIED PHYSICS LETTERS, 1994, 65 (08) :1018-1020