Electric fatigue properties of sol-gel-derived Pb(Zr, Ti)O3/PbZrO3 multilayered thin films

被引：58

作者：

Jang, JH ^{[1
]}

Yoon, KH ^{[1
]}

机构：

[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea

来源：

APPLIED PHYSICS LETTERS | 1999年 / 75卷 / 01期

关键词：

D O I：

10.1063/1.124256

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of various stacking sequences of sol-gel-prepared Pb(Zr, Ti)O-3/PbZrO3 (PZT/PZ) multilayered thin films on the electric fatigue properties was investigated. The antiferroelectric layer between the Pt electrode and the ferroelectric layers acted as a barrier to fatigue. The initial P(*)r-P(boolean AND)r (about 5 mu C/cm(2)) of the PZ(1 layer)/PZT(5 layers)/PZ(1 layer) film remained nearly unchanged after 10(9) cycles of a +/-10 V square-wave pulse. The leakage current of the multilayered films did not show any change during 10(9) cycles. (C) 1999 American Institute of Physics. [S0003-6951(99)00827-X].

引用

页码：130 / 132

页数：3

共 10 条

[1] Effect of B-site cation stoichiometry on electrical fatigue of RuO2/Pb(ZrxTi1-x)O-3/RuO2 capacitors [J].

AlShareef, HN ;

Tuttle, BA ;

Warren, WL ;

Headley, TJ ;

Dimos, D ;

Voigt, JA ;

Nasby, RD .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) :1013-1016

[2] COMPOSITIONAL CONTROL OF FERROELECTRIC FATIGUE IN PEROVSKITE FERROELECTRIC CERAMICS AND THIN-FILMS [J].

CHEN, J ;

HARMER, MP ;

SMYTH, DM .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (09) :5394-5398

[3] Electric fatigue in antiferroelectric and ferroelectric Pb(Zr,Sn,Ti)NbO3 thin films prepared by sol-gel process [J].

Jang, JH ;

Yoon, KH .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (9B) :5162-5165

[4] Electric fatigue in sol-gel prepared Pb, Zr, Sn, Ti NbO3 thin films [J].

Jang, JH ;

Yoon, KH ;

Shin, HJ .

APPLIED PHYSICS LETTERS, 1998, 73 (13) :1823-1825

[5] EFFECT OF COMPOSITION AND TEMPERATURE ON ELECTRIC FATIGUE OF LA-DOPED LEAD-ZIRCONATE-TITANATE CERAMICS [J].

JIANG, QY ;

SUBBARAO, EC ;

CROSS, LE .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (11) :7433-7443

[6] EFFECTS OF CRYSTALLINE QUALITY AND ELECTRODE MATERIAL ON FATIGUE IN PB(ZR, TI)O3 THIN-FILM CAPACITORS [J].

LEE, J ;

JOHNSON, L ;

SAFARI, A ;

RAMESH, R ;

SANDS, T ;

GILCHRIST, H ;

KERAMIDAS, VG .

APPLIED PHYSICS LETTERS, 1993, 63 (01) :27-29

[7] EFFECT OF ULTRAVIOLET-LIGHT ON FATIGUE OF LEAD-ZIRCONATE-TITANATE THIN-FILM CAPACITORS [J].

LEE, J ;

ESAYAN, S ;

SAFARI, A ;

RAMESH, R .

APPLIED PHYSICS LETTERS, 1994, 65 (02) :254-256

[8] FATIGUE AND RETENTION IN FERROELECTRIC Y-BA-CU-O/PB-ZR-TI-O/Y-BA-CU-O HETEROSTRUCTURES [J].

RAMESH, R ;

CHAN, WK ;

WILKENS, B ;

GILCHRIST, H ;

SANDS, T ;

TARASCON, JM ;

KERAMIDAS, VG ;

FORK, DK ;

LEE, J ;

SAFARI, A .

APPLIED PHYSICS LETTERS, 1992, 61 (13) :1537-1539

[9] FERROELECTRIC LA-SR-CO-O/PB-ZR-TI-O/LA-SR-CO-O HETEROSTRUCTURES ON SILICON VIA TEMPLATE GROWTH [J].

RAMESH, R ;

GILCHRIST, H ;

SANDS, T ;

KERAMIDAS, VG ;

HAAKENAASEN, R ;

FORK, DK .

APPLIED PHYSICS LETTERS, 1993, 63 (26) :3592-3594

[10] ELECTRONIC DOMAIN PINNING IN PB(ZR,TI)O3 THIN-FILMS AND ITS ROLE IN FATIGUE [J].

WARREN, WL ;

DIMOS, D ;

TUTTLE, BA ;

NASBY, RD ;

PIKE, GE .

APPLIED PHYSICS LETTERS, 1994, 65 (08) :1018-1020

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