Electric fatigue in sol-gel prepared Pb, Zr, Sn, Ti NbO3 thin films

被引:41
作者
Jang, JH [1 ]
Yoon, KH
Shin, HJ
机构
[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea
[2] Samsung Adv Inst Technol, Microsyst Lab, Suwon 440600, South Korea
关键词
D O I
10.1063/1.122294
中图分类号
O59 [应用物理学];
学科分类号
摘要
The fatigue properties of the sol-gel derived Pb-0.99[(Zr0.6Sn0.4)(1-X)Ti-X](0.98)Nb0.02O3 (40/100X/2) thin films deposited on platinized silicon substrates were investigated as a function of Ti content (0.03 less than or equal to X less than or equal to 0.15). With an increase of Ti content X, the antiferroelectric phase was transformed to the ferroelectric phase and the degradation of polarization under the repetitive switching was increased. This behavior should be closely related to the fact that the antiferroelectric phase contains mainly 180 degrees domains, which have smaller internal stresses during switching than those of 90 degrees domains. The difference of nanoscale domain structure between the antiferroelectric and ferroelectric thin films was confirmed by scanning force microscopy. (C) 1998 American Institute of Physics. [S0003-6951(98)04739-1].
引用
收藏
页码:1823 / 1825
页数:3
相关论文
共 17 条
[1]   Low temperature processing of Nb-doped Pb(Zr,Ti)O-3 capacitors with La0.5Sr0.5CoO3 electrodes [J].
AlShareef, HN ;
Tuttle, BA ;
Warren, WL ;
Dimos, D ;
Raymond, MV ;
Rodriguez, MA .
APPLIED PHYSICS LETTERS, 1996, 68 (02) :272-274
[2]   Effect of B-site cation stoichiometry on electrical fatigue of RuO2/Pb(ZrxTi1-x)O-3/RuO2 capacitors [J].
AlShareef, HN ;
Tuttle, BA ;
Warren, WL ;
Headley, TJ ;
Dimos, D ;
Voigt, JA ;
Nasby, RD .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) :1013-1016
[3]   COMPOSITIONAL CONTROL OF FERROELECTRIC FATIGUE IN PEROVSKITE FERROELECTRIC CERAMICS AND THIN-FILMS [J].
CHEN, J ;
HARMER, MP ;
SMYTH, DM .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (09) :5394-5398
[4]   TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .1. ROLE OF PB-RICH INTERMEDIATE PHASES [J].
CHEN, SY ;
CHEN, IW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (09) :2332-2336
[5]   POLYCRYSTALLINE LA0.5SR0.5COO3 PBZR0.53TI0.47O3 LA0.5SR0.5COO3 FERROELECTRIC CAPACITORS ON PLATINIZED SILICON WITH NO POLARIZATION FATIGUE [J].
DAT, R ;
LICHTENWALNER, DJ ;
AUCIELLO, O ;
KINGON, AI .
APPLIED PHYSICS LETTERS, 1994, 64 (20) :2673-2675
[6]  
Desu S. B., 1993, Integrated Ferroelectrics, V3, P365, DOI 10.1080/10584589308216692
[7]   Scanning force microscopy of domain structure in ferroelectric thin films: imaging and control [J].
Gruverman, A ;
Auciello, O ;
Ramesh, R ;
Tokumoto, H .
NANOTECHNOLOGY, 1997, 8 :A38-A43
[8]   EFFECT OF COMPOSITION AND TEMPERATURE ON ELECTRIC FATIGUE OF LA-DOPED LEAD-ZIRCONATE-TITANATE CERAMICS [J].
JIANG, QY ;
SUBBARAO, EC ;
CROSS, LE .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (11) :7433-7443
[9]   EFFECTS OF CRYSTALLINE QUALITY AND ELECTRODE MATERIAL ON FATIGUE IN PB(ZR, TI)O3 THIN-FILM CAPACITORS [J].
LEE, J ;
JOHNSON, L ;
SAFARI, A ;
RAMESH, R ;
SANDS, T ;
GILCHRIST, H ;
KERAMIDAS, VG .
APPLIED PHYSICS LETTERS, 1993, 63 (01) :27-29
[10]   EFFECT OF ULTRAVIOLET-LIGHT ON FATIGUE OF LEAD-ZIRCONATE-TITANATE THIN-FILM CAPACITORS [J].
LEE, J ;
ESAYAN, S ;
SAFARI, A ;
RAMESH, R .
APPLIED PHYSICS LETTERS, 1994, 65 (02) :254-256