Sensing properties to dilute chlorine gas of indium oxide based thin film sensors prepared by electron beam evaporation

被引：159

作者：

Tamaki, J ^{[1
]}

Naruo, C ^{[1
]}

Yamamoto, Y ^{[1
]}

Matsuoka, M ^{[1
]}

机构：

[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 83卷 / 1-3期

关键词：

indium oxide; chlorine gas sensor; thin film; electron beam evaporation;

D O I：

10.1016/S0925-4005(01)01039-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Indium oxide based thin film sensors have been prepared by means of an electron beam evaporation and subjected to the detection of dilute Cl-2 gas less than ppm-level. Among various In2O3 based sensors tested, the In2O3 thin film modified with Fe2O3 (1 wt.%) showed extremely high sensitivity to dilute Cl-2 gas of 0.2-5 ppm. The Fe2O3-In2O3 sensor showed the sensitivity as high as 4.5 to 0.2 ppm Cl-2 in air. From the results of response transients and AFM, it is assumed that the addition of Fe2O3 stabilizes the lattice oxygen in In2O3 and increases in number of adsorption site of Cl-2. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：190 / 194

页数：5

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