Development of lead zirconate titanate family thick films on various substrates

被引：41

作者：

Akiyama, Y ^{[1
]}

Yamanaka, K ^{[1
]}

Fujisawa, E ^{[1
]}

Kowata, Y ^{[1
]}

机构：

[1] RICOH Co Ltd, Res & Dev Grp, Tuzuki Ku, Yokohama, Kanagawa 2240035, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 9B期

关键词：

piezoelectric ceramic; thick film; actuator; micromachine; low-temperature sintering; screen printing;

D O I：

10.1143/JJAP.38.5524

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a POS (Piezo on Silicon) actuator, which comprise piezoelectric materials on a silicon substrate, and the actuation mechanism uses a bending vibration of a unimorph structure. Realization of this device was attempted, and the low-temperature sintering of piezoelectric ceramics, optimization of the screen-printing method and the barrier layer on a silicon substrate were developed. Regarding PMN-PZ-PT and PNN-PZ-PT bulk samples, a sintering temperature of 850 degrees C became possible with the addition of Li-Bi oxide. Pt-Rh/TaN was used as a barrier layer, and a 30 mu m-thick PNN-PZ-PT film prepared at 900 degrees C on a Si substrate with a Pt-Rh/TaN buffer layer exhibited epsilon(r) = 2790, E-c = 8.6 kV/cm and P-r = 5.7 mu C/cm(2).

引用

页码：5524 / 5527

页数：4

共 15 条

[1] Preparation of piezoelectric thick films using a jet printing system [J].

Adachi, H ;

Kuroda, Y ;

Imahashi, T ;

Yanagisawa, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (3A) :1159-1163

[2]

Akedo J., 1997, Transactions of the Institute of Electrical Engineers of Japan, Part E, V117-E, P432, DOI 10.1541/ieejsmas.117.432

[3] DIELECTRIC, FERROELECTRIC, AND PIEZOELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THICK-FILMS ON SILICON SUBSTRATES [J].

CHEN, HD ;

UDAYAKUMAR, KR ;

CROSS, LE ;

BERNSTEIN, JJ ;

NILES, LC .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) :3349-3353

[4] Preparation of c-axis oriented Pb(Zr, Ti)O-3 thin films by RF-magnetron sputtering and their dielectric and piezoelectric properties [J].

Fujii, S ;

Kanno, I ;

Kamada, T ;

Takayama, R .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9B) :6065-6068

[5] Preparation of 0.92PbZrO3-0.03PbTiO3-0.05Pb(Zn1/3Nb2/3)O3 pyroelectric thick films by screen printing [J].

Futakuchi, T ;

Matsui, Y ;

Adachi, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (9B) :5158-5161

[6]

Kawasaki T, 1998, IEICE T ELECTRON, VE81C, P584

[7] Thick-film densification for pyroelectric sensors [J].

Lucat, C ;

Menil, F ;

VonderMuhll, R .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (01) :38-41

[8]

LUFF D, 1974, BRIT CERAM TRANS J, V73, P251

[9] PREPARATION OF PB(ZR,TI)O-3 THIN-FILMS ON IR AND IRO2 ELECTRODES [J].

NAKAMURA, T ;

NAKAO, Y ;

KAMISAWA, A ;

TAKASU, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5207-5210

[10]

OUCHI H, 1968, J AM CERAM SOC, V51, P169

← 1 2 →