Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

被引：20

作者：

Nikolajeff, F

Ballen, TA

Leger, JR

Gopinath, A

Lee, TC

Williams, RC

机构：

[1] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA

[2] 3M Sci Res Labs, 3M Ctr, St Paul, MN 55144 USA

来源：

APPLIED OPTICS | 1999年 / 38卷 / 14期

关键词：

D O I：

10.1364/AO.38.003030

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mu m-diameter VCSEL's with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process. (C) 1999 Optical Society of America.

引用

页码：3030 / 3038

页数：9

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