Reversible growth-mode transition in SrRuO3 epitaxy

被引:18
作者
Bachelet, R. [1 ]
Sanchez, F. [1 ]
Santiso, J. [2 ]
Fontcuberta, J. [1 ]
机构
[1] Inst Ciencia Mat Barcelona CSIC, Bellaterra 08193, Spain
[2] CIN2 CSIC ICN, Ctr Invest Nanociencia & Nanotecnol, Bellaterra 08193, Spain
关键词
D O I
10.1063/1.3001932
中图分类号
O59 [应用物理学];
学科分类号
摘要
It is known that a transition from layer-by-layer (LbL) to step-flow (SF) can occur at the earliest stages of SrRuO(3) growth on SrTiO(3)(001). We report here the observation of a reversible transition between these two-dimensional growth modes that can occur at any SrRuO(3) thickness, tuned by short growth interruption. We show that under SF mode, growth interruption allows step-edge straightening, thus resulting in enhanced island nucleation on locally wider terraces and reduced adatom incorporation at step edges. As a result, the LbL mode is recovered. This reversible transition critically influences the growing-layer morphology and is of crucial interest in epitaxial-heterostructure fabrication. (c) 2008 American Institute of Physics.
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页数:3
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