Wiring of metallized microtubules by electron beam-induced structuring

被引:16
作者
Fritzsche, W
Köhler, JM
Böhm, KJ
Unger, E
Wagner, T
Kirsch, R
Mertig, M
Pompe, W
机构
[1] Inst Phys High Technol, Microsyst Dept, D-07702 Jena, Germany
[2] Inst Mol Biotechnol, D-07708 Jena, Germany
[3] Univ Jena, Inst Solid State Phys, D-07743 Jena, Germany
[4] Tech Univ Dresden, Inst Mat Sci, D-01069 Dresden, Germany
关键词
D O I
10.1088/0957-4484/10/3/317
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Molecular electronics emerge as a possibility to continue the miniaturization of electronic circuits down to the lower nanometre scale. One significant challenge is the electrical connection of molecular devices by nanowires. We present here the realization of a new approach for the wiring of nanostructures by linking metallized microtubules (MTs) to prestructured microelectrodes. MTs (tube-like protein structures) were metallized and deposited on microstructured substrates. Electron beam-induced deposition was used for structuring connecting gold lines as nanoelectrodes, which wire a single MT to microelectrodes created by photolithography. Initial electrical measurements confirmed the suitability of the set-up for linking nanometre-scale structures to a measurement device. A metallized MT yielded a resistance below 50 Omega over the length of 1 mu m.
引用
收藏
页码:331 / 335
页数:5
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