ELECTRON-BEAM FABRICATION OF 80-A METAL STRUCTURES

被引：262

作者：

BROERS, AN ^{[1
]}

MOLZEN, WW ^{[1
]}

CUOMO, JJ ^{[1
]}

WITTELS, ND ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.89155

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：596 / 598

页数：3

共 18 条

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