Fabry-Perot interferometry for measurements of the velocity of sputtered atoms in a magnetron discharge

被引：17

作者：

Britun, N. ^{[1
]}

Han, J. G. ^{[1
]}

Oh, S-G ^{[2
]}

机构：

[1] Sungkyunkwan Univ, Ctr Adv Plasma Surface Technol, Suwon 440746, South Korea

[2] Ajou Univ, Div Energy Syst Res, Suwon 442749, South Korea

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2008年 / 17卷 / 04期

关键词：

D O I：

10.1088/0963-0252/17/4/045013

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A planar Fabry-Perot interferometer was utilized to measure the velocity distribution function (vdf) of the atoms sputtered in a dc magnetron discharge. The measurements were performed during the sputtering of several metal targets under different discharge conditions such as applied power, working pressure and the distance from the magnetron target. The results demonstrate that there is a considerable shift of the vdf depending on the working pressure and the atomic weight of the sputtered atoms when the line of sight is perpendicular to the target. At the same time the velocity corresponding to the maximum of the vdf does not vary appreciably with the applied power. The typical net velocity of the sputtering atoms was found to be about 2 km s(-1), which is in good agreement with the data obtained recently by other diagnostic methods.

引用

页数：8

共 41 条

[1] Laser-induced resonance fluorescence as a diagnostic technique in non-thermal equilibrium plasmas [J].

Amorim, J ;

Baravian, G ;

Jolly, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (09) :R51-R65

[2] AN INTERFEROMETRIC INVESTIGATION OF THE THERMALIZATION OF COPPER ATOMS IN A MAGNETRON SPUTTERING DISCHARGE [J].

BALL, LT ;

FALCONER, IS ;

MCKENZIE, DR ;

SMELT, JM .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) :720-724

[3] Energy-and angle-dependent excitation probability of sputtered metastable silver atoms [J].

Berthold, W ;

Wucher, A .

PHYSICAL REVIEW B, 1997, 56 (07) :4251-4260

[4]

Born M, 1986, PRINCIPLES OPTICS, P329

[5] Fabry-Perot interferometry for magnetron plasma temperature diagnostics [J].

Britun, N. ;

Gaillard, M. ;

Oh, S-G ;

Han, J. G. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (17) :5098-5108

[6] Velocity distribution of neutral species during magnetron sputtering by Fabry-Perot interferometry [J].

Britun, N. ;

Han, J. G. ;

Oh, S. -G. .

APPLIED PHYSICS LETTERS, 2008, 92 (14)

[7] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].

DULLNI, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :610-613

[8] APPEARANCE ENERGIES FOR TUNGSTEN IONS FIELD-EVAPORATED FROM IONIC BONDING STATES [J].

FORBES, RG .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (07) :1357-1363

[9] Investigation of time-of-flight and energy distributions of atoms and molecules sputtered from oxygen-covered metal surfaces by laser-aided techniques [J].

Goehlich, A .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (05) :523-529

[10] Determination of angle resolved velocity distributions of sputtered tungsten atoms [J].

Goehlich, A ;

Niemöller, N ;

Döbele, HF .

JOURNAL OF NUCLEAR MATERIALS, 1999, 266 :501-506

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