A new protective AlN film for organic photoconductors

被引:11
作者
Miao, XS
Chan, YC
Pun, EYB
机构
[1] Department of Electronic Engineering, City University of Hong Kong
关键词
D O I
10.1063/1.119495
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlN film with high transmissivity was deposited onto organic photoconductor (OPC) surface and the surface hardness was increased by between 31.9% and 61.5%, and the surface roughness was also decreased. The electrophotographic properties of the OPC coated with AlN film were also improved, thus confirming the suitability of AlN film for enhancing the operating life of OPC. (C) 1997 American Institute of Physics.
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页码:184 / 186
页数:3
相关论文
共 9 条
[1]  
BORSENBERGER PM, 1993, ORGANIC PHOTORECEPTO, P292
[2]   REACTIVE LOW-VOLTAGE ION PLATING OF ALUMINUM NITRIDE FILMS AND THEIR CHARACTERISTICS [J].
DANH, NQ ;
MONZ, KH ;
PULKER, HK .
THIN SOLID FILMS, 1995, 257 (01) :116-124
[3]  
DIAMOND AS, 1991, HDB IMAGING MAT, P393
[4]   DIELECTRIC-PROPERTIES OF ALN FILMS PREPARED BY LASER-INDUCED CHEMICAL-VAPOR-DEPOSITION [J].
LI, X ;
TANSLEY, TL ;
CHIN, VWL .
THIN SOLID FILMS, 1994, 250 (1-2) :263-267
[5]  
MASAKI K, 1989, Patent No. 4886724
[6]   Optical properties and reactive sputtering conditions of AlN and AlSiN thin films for magneto-optical applications [J].
Miao, XS ;
Chan, YC ;
Lee, ZY .
JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (01) :21-24
[7]  
Otsuka S., 1992, SPIE, V1670, P128
[8]   CHEMICAL-STABILITY OF LAMINATED ALN/ALNH FILMS [J].
WANG, XD ;
MAZUR, U ;
HIPPS, KW ;
DICKSON, JT .
THIN SOLID FILMS, 1994, 240 (1-2) :45-51
[9]  
WONG KH, 1996, J ELECT MAT, V25, P1451