Reduction of threading dislocation densities in heavily lattice mismatched PbSe on Si(111) by glide

被引:75
作者
Muller, P
Zogg, H
Fach, A
John, J
Paglino, C
Tiwari, AN
Krejci, M
机构
[1] SWISS FED INST TECHNOL,ARBEITSGEMEINSCH IND FORSCH,CH-8005 ZURICH,SWITZERLAND
[2] ETH ZURICH,INST APPL PHYS,CH-8093 ZURICH,SWITZERLAND
关键词
D O I
10.1103/PhysRevLett.78.3007
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Epitaxial PbSe layers on Si(111) relax nearly completely owing to the easy dislocation glide in the main {100}[110] glide system. Threading dislocations introduced by the thermal mismatch strains are able to move distances of several cm and to escape at the edges of the samples. Etch-pit densities as low as 10(6) cm(-2) were obtained in layers with a thickness of d = 4 mu m. The etch-pit density scales with 1/d(2), which may be understood as a consequence of the annealing step and of the high mobility of dislocations. By applying several anneal cycles, threading dislocation densities of essentially zero should result.
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页码:3007 / 3010
页数:4
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