Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope

被引:223
作者
Yu, MF
Dyer, MJ
Skidmore, GD
Rohrs, HW
Lu, XK
Ausman, KD
Von Ehr, JR
Ruoff, RS
机构
[1] Washington Univ, Dept Phys, St Louis, MO 63130 USA
[2] Zyvex LLC, Richardson, TX 75081 USA
关键词
D O I
10.1088/0957-4484/10/3/304
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon nanotubes are manipulated in three dimensions inside a scanning electron microscope (SEM). A custom piezoelectric vacuum manipulator achieves positional resolutions comparable to scanning probe microscopes, with the ability to manipulate objects along one rotational and three linear degrees of freedom. This prototypical device can probe, select and handle nanometre-scale objects such as carbon nanotubes in order to explore and correlate their mechanical and electrical properties. Under real-time SEM inspection, carbon nanotubes are stressed while: monitoring their conductivity, and nanotubes are attached to commercial atomic force microscope (AFM) tips such that the forces applied to the tubes can be measured from the cantilevers' deflections. The manipulator functions both as a research tool for investigating properties of carbon nanotubes and other nanoscale objects without surface restrictions, and as a rudimentary building device for larger nanotube assemblies. This capability to select and manipulate nanoscale components and to examine directly their suitability as construction materials during various phases of the construction process will play an important role in enabling the technology of assembling mechanical and electronic devices from prefabricated components.
引用
收藏
页码:244 / 252
页数:9
相关论文
共 19 条
[1]   AFM-tip-induced and current-induced local oxidation of silicon and metals [J].
Avouris, P ;
Martel, R ;
Hertel, T ;
Sandstrom, R .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1) :S659-S667
[2]   Single-electron transport in ropes of carbon nanotubes [J].
Bockrath, M ;
Cobden, DH ;
McEuen, PL ;
Chopra, NG ;
Zettl, A ;
Thess, A ;
Smalley, RE .
SCIENCE, 1997, 275 (5308) :1922-1925
[3]  
DRESSELHAUS MS, 1998, GRAPHITE FIBERS FILA, P151
[4]   Electrical conductivity of individual carbon nanotubes [J].
Ebbesen, TW ;
Lezec, HJ ;
Hiura, H ;
Bennett, JW ;
Ghaemi, HF ;
Thio, T .
NATURE, 1996, 382 (6586) :54-56
[5]   Carbon nanotube quantum resistors [J].
Frank, S ;
Poncharal, P ;
Wang, ZL ;
de Heer, WA .
SCIENCE, 1998, 280 (5370) :1744-1746
[6]   NEW ONE-DIMENSIONAL CONDUCTORS - GRAPHITIC MICROTUBULES [J].
HAMADA, N ;
SAWADA, S ;
OSHIYAMA, A .
PHYSICAL REVIEW LETTERS, 1992, 68 (10) :1579-1581
[7]   Manipulation of individual carbon nanotubes and their interaction with surfaces [J].
Hertel, T ;
Martel, R ;
Avouris, P .
JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (06) :910-915
[8]   CHARACTERIZATION AND APPLICATION OF MATERIALS GROWN BY ELECTRON-BEAM-INDUCED DEPOSITION [J].
KOOPS, HWP ;
KRETZ, J ;
RUDOLPH, M ;
WEBER, M ;
DAHM, G ;
LEE, KL .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B) :7099-7107
[9]   ARE FULLERENE TUBULES METALLIC [J].
MINTMIRE, JW ;
DUNLAP, BI ;
WHITE, CT .
PHYSICAL REVIEW LETTERS, 1992, 68 (05) :631-634
[10]   Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy [J].
Miura, N ;
Ishii, H ;
Shirakashi, J ;
Yamada, A ;
Konagai, M .
APPLIED SURFACE SCIENCE, 1997, 113 :269-273