Diffraction grating groove analysis used to predict efficiency and scatter performance

被引：12

作者：

Content, D ^{[1
]}

机构：

[1] NASA, Goddard Space Flight Ctr, Opt Branch, Greenbelt, MD 20771 USA

来源：

GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS | 1999年 / 3778卷

关键词：

diffraction gratings; Hubble space telescope; atomic force microscope; microinterferometer; scattered light; Space Telescope Imaging Spectrograph;

D O I：

10.1117/12.363756

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Atomic force microscopy and other advanced metrology tools now allow detailed determination of the groove profiles and surface morphology of diffraction gratings and other diffractive structures. Modern electromagnetic models allow prediction of the efficiency performance of diffraction gratings in many applications. In addition, tools exist to predict the scatter from low roughness mirrors such as are used for ultraviolet to X-ray optical systems. We describe a program to apply these tools and software developed using commercial off the shelf tools such as IDL and PcGrate to a highly selected set of diffraction gratings developed for the HST/STIS instruments. Both efficiency and scatter predictions are compared with experimental data.

引用

页码：19 / 30

页数：12

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