A new sensor for remote interferometry

被引:13
作者
Osten, W [1 ]
Baumbach, T [1 ]
Jüptner, W [1 ]
机构
[1] Bremer Inst Angew Strahltechn, D-28359 Bremen, Germany
来源
ADVANCED PHOTONIC SENSORS AND APPLICATIONS II | 2001年 / 4596卷
关键词
digital comparative holography; shape control; remote metrology; coherent mask;
D O I
10.1117/12.447338
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this paper we describe a new sensor for the direct holographic comparison of the shape of two objects where it is not necessary that both samples are located at the same place. In contrast to the wellknown incoherent techniques based on inverse fringe projection this new approach prefers a coherent mask that is overlayed to the sample object having different microstructure. The coherent mask is created by digital holography to enable the instant access to the complete optical information of the master object at any wanted place. The transmission of the digital master holograms to the relevant places is done with a broadband digital telecommunication network such as the Internet. The availability of the complete optical information of the master object in the form of its digital hologram offers two ways with respect to the comparison of its shape and/or deformation with those of a sample object having different microstructure: digital comparison of the respective phase distributions of the relevant digital holograms and analogue comparison of both holograms/interferogram by digital comparative holography.
引用
收藏
页码:158 / 168
页数:11
相关论文
共 19 条
[1]   OBLIQUE-INCIDENCE INTERFEROMETRY APPLIED TO NON-OPTICAL SURFACES [J].
BIRCH, KG .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (10) :1045-1048
[2]   Grazing incidence interferometry applied to the measurement of cylindrical surfaces [J].
Dresel, T ;
Schwider, J ;
Wehrhahn, A ;
Babin, S .
OPTICAL ENGINEERING, 1995, 34 (12) :3531-3535
[3]  
FUZESSY Z, 1984, OPT ENG, V23, P780
[4]   Single-frame evaluation of object-adapted fringes [J].
Haist, T ;
Wagemann, EU ;
Tiziani, HJ .
LASER METROLOGY AND INSPECTION, 1999, 3823 :74-83
[5]   MULTIPLE-WAVELENGTH AND MULTIPLE-SOURCE HOLOGRAPHY APPLIED TO CONTOUR GENERATION [J].
HILDEBRAND, BP ;
HAINES, KA .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (02) :155-+
[6]   PROFILE MEASUREMENT USING PROJECTION OF RUNNING FRINGES [J].
INDEBETOUW, G .
APPLIED OPTICS, 1978, 17 (18) :2930-2933
[7]   Inverse projected-fringe-technique with automatic pattern adaption using a programmable spatial light modulator [J].
Kalms, MK ;
Osten, W ;
Juptner, W .
INTERNATIONAL CONFERENCE ON APPLIED OPTICAL METROLOGY, 1998, 3407 :483-489
[8]  
NEUMANN DP, 1980, MB21 OPT SOC AM
[9]  
Osten W., 2001, LaserOpto, V33, P62
[10]   New light sources and sensors for active optical 3D-inspection [J].
Osten, W ;
Jüptner, W .
ADVANCED PHOTONIC SENSORS AND APPLICATIONS, 1999, 3897 :314-327