A capacitive-type relative humidity sensor saving a double layer structure consisting of a photocrosslinked PVCA and a PMMA film

A double layer structure sensor (DLS sensor) consisting of a photocrosslinked PVCA and a PMMA film was prepared. Advantages of the photocrosslinked PVCA sensor and the PMMA sensor were reflected in the initial sensor performance of the DLS sensor. The sensing characteristics were affected by the thickness and the degree of crosslinking of the photocrosslinked PVCA layer. There was an optimum PVCA film thickness (around 0.1 mu m) for reducing the effect of both instantaneous and long-term coexistent acetone vapor.