Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

被引：415

作者：

Gong, H

Hu, JQ

Wang, JH

Ong, CH

Zhu, FR

机构：

[1] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 119260, Singapore

[2] Inst Mat Res & Engn, Singapore, Singapore

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 115卷 / 01期

关键词：

nano-crystalline Cu-doped ZnO; gas sensor; CO;

D O I：

10.1016/j.snb.2005.09.008

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 3007 350 and 400 degrees C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 degrees C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 degrees C. The sensing mechanism of the nano-structured CZO sensor is discussed. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：247 / 251

页数：5

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