Annealing effect on the electron field emission characteristics of pulsed laser deposited diamond-like carbon films an glass substrates

被引:6
作者
Hsu, JL
Sun, CY
Cheng, HF [1 ]
Chuang, FY
Tsai, CH
Wang, WC
机构
[1] Natl Taiwan Normal Univ, Dept Phys, Taipei 117, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei 106, Taiwan
[3] ITRI, Elect Res & Serv Org, Hsinchu 300, Taiwan
关键词
pulsed laser deposition; diamond-like carbon films; electron field emission;
D O I
10.1016/S0169-4332(98)00715-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The electron field emission properties of the diamond-like carbon (DLC) films prepared by the pulsed laser deposition process were observed to change significantly with the substrate temperature and the laser fluence. Raman spectroscopic analyses indicated that the substrate: temperature and laser fluence pronouncedly modify the sp(3)-bonds content of the DLC films. Larger proportion of sp(3)-bonds resulted in higher emission current density (J(e)). Post-annealing process lowers the proportion of sp(3)-bonds. The optimum electron field emission behavior obtained is emission current density (J(e))(DLC) = 480 mu A/cm(2), turn-on field (E-0)(DLC) = 8 V/mu m and effective work function (phi(e))(DLC) = 0.0546 eV. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:510 / 515
页数:6
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